Microsensors and Microelectronics Laboratory

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Research Interest
  • Functional materials, nanomaterials, and polymer composites
  • Sensors (physical, chemical, and biological sensors) and sensor materials
  • Micro-/nano-electronics and semiconductor devices
  • Micro/nanoelectromechanical systems (MEMS/NEMS)
  • Fabrication technology at micro- and nano-scales
  • Integration of sensors, electronics, and biomaterials
  • Wearable and flexible electronics


Current Project: Polymer-Nanoparticle Composites as Cryogenic Dielectrics
Polymer-based nanocomposites have attracted a lot of attention lately, due to their enhanced or modified properties from the host polymers. Our team is investigating nanoparticle-enhanced polymers, as nanocomposites, for various applications. One particular area we are exploring is polymer/nanoparticle dielectrics. Adding nanoparticles to polymers not only can potentially strengthen their dielectric strength, but also can introduce other interesting features such as optimized chemical, mechanical, and thermal properties to the final material.
(Collaborator: Dr. Robert Krchnavek, Dr. Lei Yu, Dr. Behrad Koohbor)
Dielectrics Research

Current Project: Wearable Electronics and Systems
Wearable electronics is a potential game changer for healthcare; it can drastically transform the way patients are diagnosed and treated. We aim to research and develop wearable systems that combine the state-of-the-art sensor technology, modern electronics, and biomaterials. Our objective is to create devices that are light weight, highly flexible, and comfortable to wear. A key aspect we are exploring is the integration of MEMS sensors into flexible, biocompatible materials such as silk or protein materials.
(Collaborators: Dr. Robert Hirsh, Dr. F. Mac Haas, Dr. Jeffrey Hettinger, Dr. Adarsh Gupta, Dr. Thomas Merrill)
BIA Ring  BIA Schematic

Paper and Plastic Electronics  Wearable Heart Health Monitor

Current Project: Nanomaterial-enabled Energy Harvesters
An average human body produces a large amount of energy throughout the day. Energy harvested from human body movement such as footfalls and arm swings can produce continuous, stable energy to portable electronics and implanted medical devices. For these applications, the energy harvesters need to be light, small, inexpensive, and highly portable. We are investigating novel wearable energy harvesters that can be curved to human skin for electricity generation. One approach is to integrate polyvinylidene fluoride (PVDF) nanofibers with flexible substrates; the other one is to combine piezoelectric nanoparticles into a host polymer. In the long run, these new devices can continuously harvest vibrational energy from heartbeat or muscle contraction for electrical use. This research targets the market of healthcare systems. It will have tremendous impact on implanted medical devices and the overall healthcare market.
(Collaborator: Dr. Vince Beachley and Dr. Xiao Hu)
  Testing System   Electrospinning System   Electrospun PVDF Fibers



Previous Project: Superhydrophobicity and Hydrophilicity Enabled by Micro/Nanotechnology
Inspired by the “lotus leaf effect” and its related biological structures, the research on superhydrophobic surfaces has attracted tremendous attention in the past decade. Many surfaces in nature exhibit superhydrophobic behaviors with contact angles greater than 150 degrees. Such surfaces typically possess unique properties. Because many of these surfaces have well-arranged micro/nano-structures, the creation of these surfaces can be achieved through micro/nano-fabrication methods. The superhydrophobic surfaces are finding applications in a wide range of areas, e.g. water-repellent coatings, self-cleaning fabrics, and anti-icing films. We have applied different methods to change the surface hydrophobicity of various materials, resulting in surfaces with a wide range of wettability: from superhydrophobic to superhydrophilic.
      
Pillar array to change the wettability of solid materials. The water contact angles range from 170 to 10 degrees

Previous Project: Microfluidic Devices with Integrated Carbon Nanotube (CNT) Sensor Arrays
The innovations in microfluidics and microfluidic devices have given sensor technology new meaning and new opportunities. For example, a microfluidic exchange system superimposed on a sensor can actively transport target analytes to the sensor surface, enabling the detection of analytes at ultra-low concentrations. In our group, we investigate the effective integration of nanomaterials, electronics and nanosensors, and microfluidic structures into a lab-on-a-chip device. The integrated lab-on-a-chip device is designed as a sensing platform which has great potential for future expansion in various applications. To create the sensors, we examine the selective deposition of single-walled carbon nanotubes (SWNTs) with dielectrophoresis to obtain aligned nanotubes in the forms of thin films, small bundles, and individual nanotubes. These different results are achieved by changing a number of parameters in the dielectrophoresis process and the SWNT samples. The fabrication process is compatible with the traditional microfabrication technology and has a high potential to be used in the wafer-level fabrication in the future.
            
Lab-on-a-chip microfluidic system conceptual design     Microfluidic device with integrated CNT sensors

         
            Aligned individual CNTs         Aligned CNTs between electrodes    Aligned graphene between electrodes

Previous Project: Carbon Nanotube Electronics and Sensors
We have used carbon nanotubes to create electronic devices such as resistors, field-effectors, and digital logic devices on various substrates. The high mobility of carbon nanotube enables the development of faster electronic devices. These devices can also be used for sensors, especially chemical and bio-sensors, based on their high surface-to-volume ratio. They demonstrate higher performance compared with their counterparts made on silicon or other nanomaterials.

              
      Surface profile of a CNT field-effect transistor (FET)     Enzyme biosensor using ion-sensitive FET (ISFET)

           
  CNT digital inverters              CNT electronic devices on plastic                CNT biosensors on plastic

                  
                   CNT FET structures and materials                        Testing diagram for CNT ISFET biosensors

Previous Project: Novel Micro/Nano Fabrication Methods
We are interested in all kinds of micro/nano fabrication methods and how these methods can be integrated into one process flow to fabricate devices. In the past, we have explored various approaches for both top-down and bottom-up fabrication processes, including hot embossing, layer-by-layer self-assembly, electron-beam lithography, and dielectrophoresis. We have also explored various methods for substrate bonding and device assembly.
Previous Project: Physical Sensors and Actuators on Polymers
We have used polymer materials (PMMA) to make physical MEMS devices, including all-polymer actuators, accelerometers, and tunning magnetic sensors. Novel fabrication methods such as hot embossing are used to produce polymer structures at the microscale. We have developed the expertise of theoretical analysis, modeling (by ANSYS and MATLAB), fabrication, and device testing of mechanical sensors. (Advisor: Dr. Tianhong Cui; Collaborators: Dr. Jing Wang, Dr. Yongjun Zhao)
     
              Design of a comb drive for an accelerometer                    Fabricated polymer comb drive accelerometer

             
                   Tunneling tip on polymer                 Polymer magnetic sensor                Journal cover paper




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Mechanical EngineeringHenry M. Rowan College of EngineeringRowan University